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Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options.
The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.
- Sales Rank: #94016 in Books
- Brand: Brand: CRC Press
- Published on: 2011-08-01
- Original language: English
- Number of items: 3
- Dimensions: 11.20" h x 3.30" w x 9.90" l, 13.75 pounds
- Binding: Hardcover
- 1992 pages
- Used Book in Good Condition
Review
"… the alpha and omega textbook of micro and nanofabrication and technology. … Madou’s explanations often provide new perspectives to those who are more experienced. … this feat of compressing a half century of science and engineering into one set of books makes them useful for years to come. The volumes can easily and aptly serve as course resources for students or as reference books for professionals. Summing Up: Recommended."
―CHOICE Magazine
"… offers the widest and yet the most detailed coverage of all essential and fundamental aspects of microfabrication and nanotechnology. The author has done an excellent and remarkable job in synthesizing such diverse material under a single umbrella."
―Suman Chakraborty, IIT Kharagpur, India
"Once again, Professor Madou has made an incredible contribution to the MEMS/NEMS global community in writing this series of books."
―Nico de Rooij, Director, Institute of Microengineering, EPFL, Switzerland
"… [the new three-volume format] has the potential to become a 'classic' just like the one-volume predecessor… easy to read, and I found some concepts explained in ways I hadn’t heard before… Very ambitious, very informative, very good for teaching!"
―Jorg P. Kutter, Technical University of Denmark
About the Author
University of California, Irvine, USA
Most helpful customer reviews
0 of 1 people found the following review helpful.
good
By Kwon, Jiseok
good!! very useful to me!!!
I want to recommend this product to my friends.
the color is very great apparently.
8 of 13 people found the following review helpful.
honey HE(Marc J. Madou) shrunk the world....
By Diego Radzinschi
Nanotechnology and MEMS are among the active research areas world and will continue to be so during the next decade and paving way to new generation of taking an insight into micro world making this work "Fundamentals of Microfabrication" an important stepping stone for the better future. Marc J. Madou is internationally recognized expert on sensors and sensor instrumentation who is also a leading authority on nanotechnology and microfabrication. This book will functions hand book for beginners. This book helps you explore the world of micromachines and miniaturization. The Ten chapters cover in detail, topics explaining the methodogy of microfabrications including micromachining technologies available today. Comparision of traditional and non-traditional microfabrication tools for different applications. The book also provides discussion about quantum structures and reviews molecular engineering. Appendices offer valuable information in an easily accessible format. Hyperlinked documents are provided for futher exploring the world of micromachining and microfabrication.
1 of 2 people found the following review helpful.
Reference Resource
By B. T. Price
Comprehensive in-depth reference tool - this is how the book has been characterized by a university professor using it for his course instruction. I concur. Amazing amount of practical detail in one refernce. Dimensionally a bit large and gangly but likely would require mulitple volumes if in standard book size. The web page link is a nice feature given the fast moving topic. Cleanroom reference is out of date and could be updated given the reference focus. Text discusssions well written and unusually pleasant to read.
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